Resonator configured to be integrated into an inertial angular sensor
Abstract:
The invention concerns a resonator 1 configured to be integrated into an inertial angular sensor, said resonator 1 comprising at least one mass suspended by mechanical springs 5, a number N of pairs Pi (2≤i≤N) of electrostatic springs 50, said resonator 1 defining at least four axes of symmetry S1, S2, S3 and S4, characterized in that: each pair Pi consists of two electrostatic springs 50 each having a privileged axis of action, these electrostatic springs 50 being positioned so that their respective axes form a right angle; for at least one spring of one of the pairs and one spring of another pair, the angle formed by these two springs is equal to a predefined angle.
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