Invention Grant
- Patent Title: Wavefront detector
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Application No.: US16763857Application Date: 2018-11-20
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Publication No.: US11215511B2Publication Date: 2022-01-04
- Inventor: Rudolf Saathof
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL s-Gravenhage
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL s-Gravenhage
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: EP17202729 20171121
- International Application: PCT/NL2018/050775 WO 20181120
- International Announcement: WO2019/103602 WO 20190531
- Main IPC: G01J9/02
- IPC: G01J9/02 ; G01N21/45 ; G01J9/04

Abstract:
A wavefront detector (100) and method for determining a signal wavefront (Ws) of a signal beam (Ls). A beam combiner (11) is configured to combine the signal beam (Ls) with a reference beam (Lr). An image detector (12) comprising an array of photosensitive pixels (12p) is configured to receive and measure an interference pattern (Wrs) of the combined signal and reference beams (Lr+Ls). A reference light source (14) is configured to generate the reference beam (Lr). A feedback controller (20) is configured to receive an interference signal (IB) based on measurement of at least part of the combined signal and reference beams (Lr+Ls), and control generation of the reference beam (Lr) by a feedback loop based on the interference signal (IB).
Public/Granted literature
- US20200284661A1 WAVEFRONT DETECTOR Public/Granted day:2020-09-10
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