Invention Grant
- Patent Title: Inspection apparatus and inspection method
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Application No.: US16650935Application Date: 2018-09-20
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Publication No.: US11215526B2Publication Date: 2022-01-04
- Inventor: Katsuji Kimura , Hiroyuki Yamanaka , Yuji Furukawa , Kohei Harada , Hironori Takahashi , Hiroyuki Goto , Heiichiro Ryu , Katsuaki Tatebayashi
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Chip Law Group
- Priority: JPJP2017-194477 20171004
- International Application: PCT/JP2018/034730 WO 20180920
- International Announcement: WO2019/069693 WO 20190411
- Main IPC: G01M11/02
- IPC: G01M11/02 ; G01N21/88 ; G01R31/28 ; G01R31/26 ; G01R31/311

Abstract:
The present disclosure relates to an inspection apparatus and an inspection method that enable inspection of the performance of an image pickup element. Generation of collimated light and transmission of part of the collimated light through a transmission filter having a light-blocking face provided with circular holes arranged regularly, causes conversion to rays of columnar collimated light arranged regularly. An image including the rays of columnar collimated light arranged regularly, is captured by an image pickup element being inspected. Then, acquisition of the difference between the image captured by the image pickup element being inspected and an ideal image captured by an ideal image pickup element and comparison between the difference and a threshold, result in inspection of the performance of the image pickup element being inspected.
Public/Granted literature
- US20200292414A1 INSPECTION APPARATUS AND INSPECTION METHOD, AND PROGRAM Public/Granted day:2020-09-17
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