Invention Grant
- Patent Title: MEMS micro-mirror device
-
Application No.: US15069281Application Date: 2016-03-14
-
Publication No.: US11215815B2Publication Date: 2022-01-04
- Inventor: Nicolas Abele , Faouzi Khechana , Lucio Kilcher
- Applicant: GOOGLE LLC
- Applicant Address: US CA Mountain View
- Assignee: GOOGLE LLC
- Current Assignee: GOOGLE LLC
- Current Assignee Address: US CA Mountain View
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08 ; G02B26/00 ; G03B21/14 ; G03B21/28 ; H04N9/31 ; G03B21/20

Abstract:
A MEMS micro-mirror device includes, a single package; a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror.
Public/Granted literature
- US20160195713A1 MEMS MICRO-MIRROR DEVICE Public/Granted day:2016-07-07
Information query