The present application provides an apparatus for a photo-alignment process. The apparatus for a photo-alignment process includes a reflector, an up-conversion layer, and a polarizer optically coupled together. The reflector is configured to reflect an infrared light and provide a reflected infrared light to the up-conversion layer. The up-conversion layer is configured to convert the reflected infrared light to an ultraviolet light, and provide the ultraviolet light to the polarizer. The polarizer is configured to convert the ultraviolet light to a polarized ultraviolet light for the photo-alignment process.