Invention Grant
- Patent Title: Method of performing optical proximity correction and method of manufacturing lithographic mask by using the same
-
Application No.: US16848906Application Date: 2020-04-15
-
Publication No.: US11215919B2Publication Date: 2022-01-04
- Inventor: Sanghun Kim , Joobyoung Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2019-0111566 20190909
- Main IPC: G03F1/36
- IPC: G03F1/36 ; G03F7/20 ; G06F30/398 ; G06F119/18

Abstract:
A method of manufacturing a lithographic mask includes performing optical proximity correction (OPC) for correcting an optical proximity effect (OPE) on a design layout, and forming a lithographic mask based on the design layout corrected by performing the OPC, wherein performing the OPC includes generating a plurality of segments. and adjusting a bias of the plurality of segments, and the plurality of dissection positions include global uniform dissection positions defined for each third length based on a global coordinate system that is a coordinate system of the whole design layout.
Public/Granted literature
Information query