Invention Grant
- Patent Title: Composition for resist underlayer film formation, resist underlayer film and method for forming the same, and production method of a patterned substrate
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Application No.: US16354344Application Date: 2019-03-15
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Publication No.: US11215928B2Publication Date: 2022-01-04
- Inventor: Kazunori Takanashi , Hiroki Nakatsu , Kazunori Sakai , Ichihiro Miura
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Element IP, PLC
- Priority: JPJP2016-181542 20160916,JPJP2017-054209 20170321
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C07D265/16 ; G03F7/09 ; H01L21/027 ; C07D413/14 ; C09D165/00 ; G03F7/16 ; C09D161/12

Abstract:
A composition for resist underlayer film formation contains: a first compound including at least one oxazine structure fused to an aromatic ring; and a solvent. The first compound preferably includes a partial structure represented by formula (1). In formula (1), R2 to R5 each independently represent a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; Ar1 represents a group obtained by removing (n+3) or (n+2) hydrogen atoms on the aromatic ring from an arene having 6 to 20 carbon atoms; R6 represents a hydroxy group, a halogen atom, a nitro group or a monovalent organic group having 1 to 20 carbon atoms; and n is an integer of 0 to 9.
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