Invention Grant
- Patent Title: Plasmonic photocathode emitters
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Application No.: US17029501Application Date: 2020-09-23
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Publication No.: US11217416B2Publication Date: 2022-01-04
- Inventor: Sergei Belousov , Andrey Knizhnik , Inna M. Iskandarova , Boris Potapkin , Katerina Ioakeimidi , Gildardo R. Delgado , Frances Hill , Gary V. Lopez Lopez , Miguel Gonzalez
- Applicant: KLA CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA CORPORATION
- Current Assignee: KLA CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: H01J1/34
- IPC: H01J1/34 ; G02B5/00

Abstract:
A photocathode emitter includes a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure array is configured to operate at a wavelength from 193 nm to 430 nm. The plasmonic structure array can be made of aluminum. An electron beam can be generated from a light beam directed at the plasmonic structure array of the photocathode emitter.
Public/Granted literature
- US20210098223A1 PLASMONIC PHOTOCATHODE EMITTERS Public/Granted day:2021-04-01
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