Invention Grant
- Patent Title: Method of producing a two-dimensional material
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Application No.: US16795841Application Date: 2020-02-20
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Publication No.: US11217447B2Publication Date: 2022-01-04
- Inventor: Simon Charles Stewart Thomas
- Applicant: Paragraf Ltd.
- Applicant Address: GB Somersham
- Assignee: Paragraf Ltd.
- Current Assignee: Paragraf Ltd.
- Current Assignee Address: GB Somersham
- Agency: Stinson LLP
- Priority: GB1514542 20150814,GB1519182 20151030,GB1523083 20151230,GB1610467 20160615
- Main IPC: C30B25/10
- IPC: C30B25/10 ; H01L21/02 ; C30B29/02 ; C30B29/06 ; C30B25/16 ; C30B29/60 ; C23C16/26 ; C23C16/24 ; C01B32/186 ; C23C16/455 ; C30B25/14 ; C30B29/40

Abstract:
A method of producing graphene or other two-dimensional material such as graphene including heating the substrate held within a reaction chamber to a temperature that is within a decomposition range of a precursor, and that allows two-dimensional crystalline material formation from a species released from the decomposed precursor; establishing a steep temperature gradient (preferably >1000° C. per meter) that extends away from the substrate surface towards an inlet for the precursor; and introducing precursor through the relatively cool inlet and across the temperature gradient towards the substrate surface. The steep temperature gradient ensures that the precursor remains substantially cool until it is proximate the substrate surface thus minimizing decomposition or other reaction of the precursor before it is proximate the substrate surface. The separation between the precursor inlet and the substrate is less than 100 mm.
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