Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method thereof
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Application No.: US16928517Application Date: 2020-07-14
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Publication No.: US11217523B2Publication Date: 2022-01-04
- Inventor: Nam Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2020-0006824 20200117
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L21/768 ; H01L23/528 ; H01L23/535 ; H01L27/11582

Abstract:
A semiconductor device includes bit lines and a common source line connected to a memory cell array, wherein the bit lines and the common source line are spaced apart from each other in a first level; a pad pattern spaced apart from the bit lines and the common source line in the first level; a first insulating layer covering the bit lines, the common source line, and the pad pattern; a shielding pattern overlapping with the bit lines and disposed on the first insulating layer; a first upper line and a second upper line spaced apart from each other above the shielding pattern; a plurality of contact plugs extending from the first and second upper lines toward the bit lines, common source line, and pad pattern, wherein one or more of the plurality of contact plugs connect the shielding pattern to the second upper line.
Public/Granted literature
- US20210225758A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-07-22
Information query
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