Invention Grant
- Patent Title: Nonvolatile memory device
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Application No.: US16675006Application Date: 2019-11-05
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Publication No.: US11217598B2Publication Date: 2022-01-04
- Inventor: Bo Yun Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2019-0060870 20190523
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L27/10 ; H01L45/00

Abstract:
A nonvolatile memory device according to an embodiment of the present disclosure includes a substrate having a channel layer, a first tunneling layer disposed on the channel layer, a second tunneling layer disposed on the first tunneling layer, a third tunneling layer disposed on the second tunneling layer, a charge trap layer disposed on the third tunneling layer, a charge barrier layer disposed on the charge trap layer, and a gate electrode layer disposed on the charge barrier layer. The first tunneling layer includes a first insulative material. The second tunneling layer includes a second insulative material. The third tunneling layer includes a second insulative material. The resistance switching material is a material whose electric resistance varies reversibly between a high resistance state and a low resistance state depending on a magnitude of an applied electric field.
Public/Granted literature
- US20200373311A1 NONVOLATILE MEMORY DEVICE Public/Granted day:2020-11-26
Information query
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