Invention Grant
- Patent Title: Memory device and method for fabricating the memory device
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Application No.: US16710916Application Date: 2019-12-11
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Publication No.: US11217602B2Publication Date: 2022-01-04
- Inventor: Jin-Ho Bin , Il-Young Kwon , Tae-Hong Gwon , Hye-Hyeon Byeon
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2019-0068038 20190610
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L27/11556 ; H01L27/11519 ; H01L27/11524 ; H01L27/11565

Abstract:
Disclosed is a memory device and a method for fabricating the same, and the method may include forming an alternating stack in which dielectric layers and sacrificial layers are alternately stacked over a substrate, each of the sacrificial layers being a combination of porous and non-porous materials, forming a vertical opening penetrating the alternating stack, converting exposed surfaces of the sacrificial layers located on a side wall of the vertical opening into blocking layers through an oxidation process, forming a vertical channel structure contacting the blocking layers in the vertical opening, and replacing non-converting portions of the sacrificial layers with conductive layers, wherein each of the conductive layers comprises a round-like edge contacting each of the blocking layers.
Information query
IPC分类: