Invention Grant
- Patent Title: Sensor device and method of manufacturing the same
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Application No.: US16699957Application Date: 2019-12-02
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Publication No.: US11217619B2Publication Date: 2022-01-04
- Inventor: Christian Kirchhof
- Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: McClure, Qualey & Rodack, LLP
- Priority: DE102017209498.2 20170606
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A sensor device for detecting an incident energy beam, the sensor device having stacked layers, the layers having: a first photodiode layer, at least four measuring contacts being arranged on electrode layers of the first photodiode layer, at each of which a partial current of a photocurrent dependent on the incident energy beam can be tapped, to determine an x and y coordinate in the three-dimensional coordinate system; and a second photodiode layer fixed to the first photodiode layer, at least four measuring contacts being arranged on electrode layers of the second photodiode layer, at each of which a partial current of a photocurrent dependent on the incident energy beam can be tapped, to determine an x and y coordinate in the three-dimensional coordinate system; wherein at least one of the photodiode layers is transparent.
Information query
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