Invention Grant
- Patent Title: Ferroelectric memories
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Application No.: US16842589Application Date: 2020-04-07
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Publication No.: US11217661B2Publication Date: 2022-01-04
- Inventor: Yu-De Lin , Heng-Yuan Lee , Po-Chun Yeh , Chih-Yao Wang , Hsin-Yun Yang
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Priority: TW109103150 20200203
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L27/11502 ; H01L27/11507 ; G11C11/22

Abstract:
A ferroelectric memory is provided. The ferroelectric memory includes a substrate, a first conductive layer disposed on the substrate, a patterned oxide layer disposed on the first conductive layer and the substrate, exposing a part of the first conductive layer, a second conductive layer disposed on the exposed first conductive layer and the patterned oxide layer, an antiferroelectric layer disposed on the exposed first conductive layer and the second conductive layer, a ferroelectric layer disposed on the second conductive layer and located on the antiferroelectric layer, a conductive oxide layer disposed between the antiferroelectric layer, and a third conductive layer disposed on the conductive oxide layer and between the ferroelectric layer.
Public/Granted literature
- US20210242304A1 FERROELECTRIC MEMORIES Public/Granted day:2021-08-05
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