Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
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Application No.: US16812091Application Date: 2020-03-06
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Publication No.: US11217671B2Publication Date: 2022-01-04
- Inventor: Kang Sik Choi
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2018-0038838 20180403
- Main IPC: H01L27/11514
- IPC: H01L27/11514 ; H01L29/417 ; H01L29/423 ; H01L29/10 ; H01L27/11582

Abstract:
A semiconductor device and manufacturing method includes a well structure, a gate stack structure spaced apart from the well structure, the gate stack structure being disposed over the well structure, and a source contact structure facing a sidewall of the gate stack structure. The semiconductor device further includes a channel pattern having pillar parts penetrating the gate stack structure, a first connecting part extending along a bottom surface of the gate stack structure from the pillar parts, and a second connecting part extending from the first connecting part to contact a first surface of the source contact structure facing the well structure.
Public/Granted literature
- US20200212187A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-07-02
Information query
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