Invention Grant
- Patent Title: Vertical field-effect transistor with T-shaped gate
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Application No.: US16420530Application Date: 2019-05-23
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Publication No.: US11217680B2Publication Date: 2022-01-04
- Inventor: Yi Song , Juntao Li , Huimei Zhou , Kangguo Cheng , Ardasheir Rahman
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Erik Johnson
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L29/78 ; H01L21/308 ; H01L21/033 ; H01L21/28 ; H01L21/8234

Abstract:
A method of forming a semiconductor structure includes forming a fin over a substrate, forming a bottom source/drain over the substrate surrounding a first portion of sidewalls of the fin, and forming a bottom spacer over the bottom source/drain and surrounding a second portion of the sidewalls of the fin. The method also includes forming a T-shaped gate stack over the bottom spacer and surrounding a third portion of the sidewalls of the fin, forming a top spacer over the T-shaped gate stack and surrounding a fourth portion of the sidewalls of the fin, and forming a top source/drain over the top spacer and surrounding a fifth portion of the sidewalls and a top surface of the fin. The T-shaped gate stack includes a gate dielectric, a gate conductor, and a gate metal extending outward from a portion of sidewalls of the gate conductor between the bottom and top spacers.
Public/Granted literature
- US20200373413A1 VERTICAL FIELD-EFFECT TRANSISTOR WITH T-SHAPED GATE Public/Granted day:2020-11-26
Information query
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