Invention Grant
- Patent Title: Field-effect transistor and method for manufacturing the same
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Application No.: US16822175Application Date: 2020-03-18
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Publication No.: US11217694B2Publication Date: 2022-01-04
- Inventor: Qiuxia Xu , Kai Chen
- Applicant: Shanghai Industrial μTechnology Research Institute
- Applicant Address: CN Shanghai
- Assignee: Shanghai Industrial μTechnology Research Institute
- Current Assignee: Shanghai Industrial μTechnology Research Institute
- Current Assignee Address: CN Shanghai
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Judson K. Champlin
- Priority: CN201910202715.8 20190318,CN201910202716.2 20190318,CN201910202930.8 20190318
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/3213 ; H01L29/49 ; H01L21/02 ; H01L21/28 ; H01L29/06 ; H01L21/3065 ; H01L29/423

Abstract:
Disclosed is a field-effect transistor and a method for manufacturing a field-effect transistor. The method comprises: forming an NMOSFET region and a PMOSFET region on a substrate; forming a hard mask on the NMOSFET region and the PMOSFET region, and patterning through the hard mask; forming a multiple of stacked nanowires in the NMOSFET region and a multiple of stacked nanowires in the PMOSFET region; forming a first array of nanowires in the NMOSFET region and a second array of nanowires in the PMOSFET region; and forming an interfacial oxide layer, a ferroelectric layer, and a stacked metal gate in sequence around each of the nanowires included in the first array and the second array. Wherein the NMOSFET region and the PMOSFET region are separated by shallow trench isolation.
Public/Granted literature
- US20200303208A1 FIELD-EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2020-09-24
Information query
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