Invention Grant
- Patent Title: Nitride semiconductor ultraviolet light-emitting element
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Application No.: US16969161Application Date: 2018-02-14
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Publication No.: US11217726B2Publication Date: 2022-01-04
- Inventor: Akira Hirano , Yosuke Nagasawa , Shigefusa Chichibu , Kazunobu Kojima
- Applicant: Soko Kagaku Co., Ltd.
- Applicant Address: JP Ishikawa
- Assignee: Soko Kagaku Co., Ltd.
- Current Assignee: Soko Kagaku Co., Ltd.
- Current Assignee Address: JP Ishikawa
- Agency: Haynes Beffel & Wolfeld LLP
- International Application: PCT/JP2018/005126 WO 20180214
- International Announcement: WO2019/159265 WO 20190822
- Main IPC: H01L33/32
- IPC: H01L33/32 ; H01L33/06 ; H01L33/00

Abstract:
To improve a wall plug efficiency in a nitride semiconductor light-emitting element for extracting ultraviolet light emitted from an active layer toward an n-type nitride semiconductor layer side to outside of the element. In the n-type AlGaN-based semiconductor layer 21 constituting the nitride semiconductor light-emitting element 1, a plurality of thin film-like Ga-rich layers that is a part of the n-type layer 21 having a locally high Ga composition ratio exists spaced apart from each other in a vertical direction that is orthogonal to the upper surface of the n-type layer 21, an extending direction of at least a part of the plurality of Ga-rich layers on a first plane parallel to the vertical direction is inclined with respect to an intersection line between the upper surface of the n-type layer and the first plane, the plurality of Ga-rich layers exists in stripes on the second plane parallel to the upper surface of the n-type layer 21 in an upper layer region having a thickness of 100 nm or less at lower side from the upper surface of the n-type layer 21, AlN molar fractions of the Ga-rich layers 21b are greater than AlN molar fraction of a well layer 22b in an active layer 22 constituting the light-emitting element 1.
Public/Granted literature
- US20210043804A1 NITRIDE SEMICONDUCTOR ULTRAVIOLET LIGHT-EMITTING ELEMENT Public/Granted day:2021-02-11
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