Invention Grant
- Patent Title: Optically stimulated electron emission apparatus
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Application No.: US15962827Application Date: 2018-04-25
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Publication No.: US11218111B2Publication Date: 2022-01-04
- Inventor: Todd Ferrante
- Applicant: Analytical Mechanics Associates, Inc.
- Applicant Address: US VA Hampton
- Assignee: Analytical Mechanics Associates, Inc.
- Current Assignee: Analytical Mechanics Associates, Inc.
- Current Assignee Address: US VA Hampton
- Agency: Mueting Raasch Group
- Main IPC: H02S50/15
- IPC: H02S50/15 ; G01N23/2273

Abstract:
An apparatus for inspecting a surface includes a housing and a probe. The housing includes a light source to direct light along a longitudinal axis and a shutter to selectively allow light to pass through to the probe. The probe includes a body portion and a head portion. The head portion of the probe includes a collector to detect photoelectrons emitted from the surface in response to light from the light source impinging on the surface. A proximal portion of the head portion moves relative to a distal portion of the head portion to allow for variations in angle relative to the surface.
Public/Granted literature
- US20180309405A1 OPTICALLY STIMULATED ELECTRON EMISSION APPARATUS Public/Granted day:2018-10-25
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