Optically stimulated electron emission apparatus
Abstract:
An apparatus for inspecting a surface includes a housing and a probe. The housing includes a light source to direct light along a longitudinal axis and a shutter to selectively allow light to pass through to the probe. The probe includes a body portion and a head portion. The head portion of the probe includes a collector to detect photoelectrons emitted from the surface in response to light from the light source impinging on the surface. A proximal portion of the head portion moves relative to a distal portion of the head portion to allow for variations in angle relative to the surface.
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