Invention Grant
- Patent Title: Spectrum shaping devices and techniques for optical characterization applications
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Application No.: US16749168Application Date: 2020-01-22
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Publication No.: US11226234B2Publication Date: 2022-01-18
- Inventor: Guoheng Zhao , Edward W. Budiarto , Todd J. Egan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G01J3/28
- IPC: G01J3/28 ; G01J3/14 ; G02B6/293 ; G01J3/02

Abstract:
Implementations disclosed describe a system comprising a first optical device to receive an input beam of light, the input beam having a plurality of spectral components of light, and cause the input beam to disperse into a plurality of spectral beams, wherein each of the plurality of spectral beams corresponds to one of the plurality of spectral components and propagates along a spatial path that is different from spatial paths of other spectral beams, and a second optical device to collect a portion of each of the spectral beams, wherein the collected portion depends on the spatial path of the respective spectral beam, and form an output beam of light from the collected portion of each of the spectral beams, wherein a spectral profile of the output beam is different from a spectral profile of the input beam of light.
Public/Granted literature
- US20210223102A1 SPECTRUM SHAPING DEVICES AND TECHNIQUES FOR OPTICAL CHARACTERIZATION APPLICATIONS Public/Granted day:2021-07-22
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