Invention Grant
- Patent Title: Self-priming resist for generic inorganic hardmasks
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Application No.: US16101411Application Date: 2018-08-11
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Publication No.: US11226561B2Publication Date: 2022-01-18
- Inventor: Chi-Chun Liu , Indira Seshadri , Kristin Schmidt , Nelson Felix , Daniel Sanders , Jing Guo , Ekmini Anuja De Silva , Hoa Truong
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Intelletek Law Group, PLLC
- Agent Gabriel Daniel, Esq.
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/09 ; G03F7/004

Abstract:
A self-priming resist may be formed from a first random copolymer forming a resist and a polymer brush having the general formula poly(A-r-B)-C-D, wherein A is a first polymer unit, B is a second polymer unit, wherein A and B are the same or different polymer units, C is a cleavable unit, D is a grafting group and r indicates that poly(A-r-B) is a second random copolymer formed from the first and second polymer units. The first random copolymer may be the same or different from the second random polymer. The self-priming resist can create a one-step method for forming an adhesion layer and resist by using the resist/brush blend.
Public/Granted literature
- US20200050108A1 SELF-PRIMING RESIST FOR GENERIC INORGANIC HARDMASKS Public/Granted day:2020-02-13
Information query
IPC分类: