Invention Grant
- Patent Title: Automated image measurement for process development and optimization
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Application No.: US17216449Application Date: 2021-03-29
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Publication No.: US11227193B2Publication Date: 2022-01-18
- Inventor: Abhinav Kumar , Benjamin Schwarz , Charles Hardy
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/62
- IPC: G06K9/62 ; G06N3/08 ; G06N20/00 ; G06T5/00 ; G06K9/80 ; G06T5/50

Abstract:
A method includes providing attributes of a manufacturing process and an image of a product associated with the manufacturing process to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, predictive data. The method further includes determining, based on the predictive data, image measurements of the image of the product associated with the manufacturing process. Manufacturing parameters of the manufacturing process are to be updated based on the image measurements.
Public/Granted literature
- US20210216809A1 AUTOMATED IMAGE MEASUREMENT FOR PROCESS DEVELOPMENT AND OPTIMIZATION Public/Granted day:2021-07-15
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