Invention Grant
- Patent Title: Passivation of nonlinear optical crystals
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Application No.: US16287237Application Date: 2019-02-27
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Publication No.: US11227770B2Publication Date: 2022-01-18
- Inventor: Yung-Ho Alex Chuang , Vladimir Dribinski
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01N21/59
- IPC: G01N21/59 ; H01L21/30 ; C30B29/10 ; C30B33/00 ; C30B33/02 ; G01N21/95 ; G02F1/35 ; G01N21/3563 ; G01N21/88 ; H01L21/322 ; H01S3/02 ; H01S3/094 ; H01S3/109 ; H01S3/16 ; G01N21/35 ; G01N21/84

Abstract:
A laser system includes a nonlinear optical (NLO) crystal, wherein the NLO crystal is annealed within a selected temperature range. The NLO crystal is passivated with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound to a selected passivation level. The system further includes at least one light source, wherein at least one light source is configured to generate light of a selected wavelength and at least one light source is configured to transmit light through the NLO crystal. The system further includes a crystal housing unit configured to house the NLO crystal.
Public/Granted literature
- US20190198330A1 Passivation of Nonlinear Optical Crystals Public/Granted day:2019-06-27
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