Invention Grant
- Patent Title: System and method for operating the same
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Application No.: US16510552Application Date: 2019-07-12
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Publication No.: US11227780B2Publication Date: 2022-01-18
- Inventor: Jia-Rong Xiao , Wei-Hsiang Huang , Sen-Yeo Peng , Chui-Ya Peng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
A system is disclosed herein. The system includes a tank, a tube, a cooler, and a concentration meter. The tank is configured to contain first liquid. The tube is coupled to the tank and configured to convey the first liquid from the tank. The cooler covers the tube to cool the first liquid conveyed by the tube. The concentration meter is configured to measure a concentration of the first liquid cooled by the cooler.
Public/Granted literature
- US20200094294A1 SYSTEM AND METHOD FOR OPERATING THE SAME Public/Granted day:2020-03-26
Information query
IPC分类: