Invention Grant
- Patent Title: Photosensitive element having substantially flat interface between electrode and photosensitive layer and manufacturing method thereof
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Application No.: US16360037Application Date: 2019-03-21
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Publication No.: US11227874B2Publication Date: 2022-01-18
- Inventor: Po-Chao Chang , Ruei-Pei Chen , Kuo-Yu Huang , Chao-Chien Chiu
- Applicant: Au Optronics Corporation
- Applicant Address: TW Hsinchu
- Assignee: Au Optronics Corporation
- Current Assignee: Au Optronics Corporation
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: TW107118347 20180529
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/12 ; G03F7/075 ; G03F7/09 ; G03F7/11

Abstract:
A photosensitive element and a manufacturing method thereof are provided. The manufacturing method of the photosensitive element includes successively depositing a second conductive layer, a photosensitive material layer, and a first top electrode material layer on a substrate; forming a first patterned photoresist layer on the first top electrode material layer; patterning the first top electrode material layer by using the first patterned photoresist layer as a mask to form a first top electrode; removing the first patterned photoresist layer; patterning the photosensitive material layer by using the first top electrode as a mask to form a photosensitive layer; forming an insulation layer having an opening on the first top electrode; and forming a second top electrode on the insulation layer, and the second top electrode is electrically connected to the first top electrode via the opening.
Public/Granted literature
- US2166407A Reel seat Public/Granted day:1939-07-18
Information query
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