Invention Grant
- Patent Title: MRAM integration with BEOL interconnect including top via
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Application No.: US16443934Application Date: 2019-06-18
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Publication No.: US11227892B2Publication Date: 2022-01-18
- Inventor: Ashim Dutta , Chih-Chao Yang , Ekmini A. De Silva , Dominik Metzler
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent L. Jeffrey Kelly
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L27/22 ; H01L43/02

Abstract:
A method is presented for preventing excessive cap dielectric loss in memory areas and logic areas of a device. The method includes forming a first conductive line with top via and a conductive pad over a dielectric layer, wherein the conductive pad includes a microstud, depositing a dielectric cap in direct contact with the first conductive line and the conductive pad, and constructing a top electrode, a magnetic tunnel junction (MTJ) stack, and a bottom electrode in vertical alignment with the microstud of the conductive pad.
Information query
IPC分类: