Invention Grant
- Patent Title: Method for improved manufacturing of a photodiode-based optical sensor and associated device
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Application No.: US16635480Application Date: 2018-07-30
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Publication No.: US11227968B2Publication Date: 2022-01-18
- Inventor: Florian Le Goff , Jean-Luc Reverchon
- Applicant: THALES , COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Courbevoie; FR Paris
- Assignee: THALES,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: THALES,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Courbevoie; FR Paris
- Agency: BakerHostetler
- International Application: PCT/EP2018/070570 WO 20180730
- International Announcement: WO2019/025354 WO 20190207
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/103 ; H01L27/146 ; H04N5/378

Abstract:
A process for fabricating a hybrid optical detector, includes the steps of: assembling, via an assembly layer, on the one hand an absorbing structure and on the other hand a read-out circuit, locally etching, through the absorbing structure, the assembly layer and the read-out circuit up to the contacts, so as to form electrical via-holes, depositing a protective layer on the walls of the via-holes, producing a doped region of a second doping type different from the first doping type by diffusing a dopant into the absorbing structure through the protective layer, the region extending annularly around the via-holes so as to form a diode, depositing a metallization layer on the walls of the via-holes allowing the doped region to be electrically connected to the contact.
Public/Granted literature
- US20200373455A1 METHOD FOR IMPROVED MANUFACTURING OF A PHOTODIODE-BASED OPTICAL SENSOR AND ASSOCIATED DEVICE Public/Granted day:2020-11-26
Information query
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