Invention Grant
- Patent Title: Planar resistive random-access memory (RRAM) device with a shared top electrode
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Application No.: US16922049Application Date: 2020-07-07
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Publication No.: US11227997B1Publication Date: 2022-01-18
- Inventor: Ashim Dutta , Saumya Sharma , Tianji Zhou , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent L. Jeffrey Kelly
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Embodiments of the present invention are directed to forming a planar Resistive Random Access Memory (RRAM) device with a shared top electrode. In a non-limiting embodiment of the invention, a first trench having a first width and a second trench having a second width less than the first width are formed in a dielectric layer. A bottom liner is formed on sidewalls of the first trench. The bottom liner pinches off the second trench. A top liner is formed on sidewalls of the bottom liner in the first trench. The top liner is formed such that a portion of the bottom liner at a bottommost region of the first trench remains exposed. The exposed portion of the bottom liner is removed, and a memory cell material is formed in the first trench.
Public/Granted literature
- US20220013723A1 PLANAR RESISTIVE RANDOM-ACCESS MEMORY (RRAM) DEVICE WITH A SHARED TOP ELECTRODE Public/Granted day:2022-01-13
Information query
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