Invention Grant
- Patent Title: Piezoelectric thin film resonator with insertion film, filter, and multiplexer
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Application No.: US15877070Application Date: 2018-01-22
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Publication No.: US11228299B2Publication Date: 2022-01-18
- Inventor: Jiansong Liu , Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Taisei Irieda
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JPJP2017-017647 20170202,JPJP2017-017702 20170202
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/02 ; H03H9/13 ; H03H9/58 ; H03H3/02

Abstract:
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film; and an insertion film that is inserted between the lower electrode and the upper electrode, is located in an outer peripheral region within a resonance region where the lower electrode and the upper electrode face each other across the piezoelectric film, is located in a region that is located outside the resonance region and surrounds the resonance region, is not located in a center region of the resonance region, and includes a first part, which is located in the resonance region and has a first film thickness, and a second part, which is located outside the resonance region and has a second film thickness, the first film thickness being less than the second film thickness.
Public/Granted literature
- US20180219528A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND MULTIPLEXER Public/Granted day:2018-08-02
Information query
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