Invention Grant
- Patent Title: Method of operating a charged particle gun, charged particle gun, and charged particle beam device
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Application No.: US17075905Application Date: 2020-10-21
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Publication No.: US11232924B2Publication Date: 2022-01-25
- Inventor: Dieter Winkler
- Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01J3/02
- IPC: H01J3/02 ; H01J37/073
Abstract:
A charged particle gun for a charged particle beam device is described. The charged particle gun includes a gun housing; an emitter provided in the gun housing, the emitter being configured to emit a charged particle beam along an axis; an emitter power supply connected to the emitter; a trapping electrode provided in the gun housing, the trapping electrode at least partially surrounding the axis; a trapping power supply connected to the trapping electrode; and a shielding element shielding an electrostatic field of the trapping electrode from the axis during operation of the gun housing.
Public/Granted literature
- US20210241990A1 METHOD OF OPERATING A CHARGED PARTICLE GUN, CHARGED PARTICLE GUN, AND CHARGED PARTICLE BEAM DEVICE Public/Granted day:2021-08-05
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