Invention Grant
- Patent Title: System and method for self-cleaning wet treatment process
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Application No.: US16445927Application Date: 2019-06-19
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Publication No.: US11232958B2Publication Date: 2022-01-25
- Inventor: Kenji Michael Nulman , Mark Yannuzzi , Phillip Tyler , Jonathan Fijal , William Gilbert Breingan , John Taddei , Nicholas Baverov , James Swallow , Christopher Orlando , Paul Vit , Christopher Hofmeister , Tremayne Diggs
- Applicant: VEECO INSTRUMENTS INC.
- Applicant Address: US NY Plainview
- Assignee: VEECO INSTRUMENTS INC.
- Current Assignee: VEECO INSTRUMENTS INC.
- Current Assignee Address: US NY Plainview
- Agency: Leason Ellis LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B3/02 ; B08B3/10 ; H01L21/02

Abstract:
An apparatus for supporting and maneuvering a wafer comprises a handle having a gas inlet adapted to couple to a gas supply, a supporting surface coupled to the handle section including a frame structure having edge segments connecting at vertices and spoke elements extending from a center of the frame structure to the vertices, a gas supply channel coupled to the gas inlet that extends from the handle and branches into channels that run through the spoke elements, and a plurality of nozzles positioned at the vertices on the supporting surface and coupled to the channels in the spoke elements. Gas provided to the plurality of nozzles exits the nozzles in a stream directed parallel to the supporting surface and the stream of gas generates forces that enable wafers to be securely supported in a floating manner over the supporting surface without coming into direct contact with the supporting surface.
Public/Granted literature
- US20200013641A1 SYSTEM AND METHOD FOR SELF-CLEANING WET TREATMENT PROCESS Public/Granted day:2020-01-09
Information query
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