Invention Grant
- Patent Title: Transport system
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Application No.: US16591456Application Date: 2019-10-02
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Publication No.: US11232965B2Publication Date: 2022-01-25
- Inventor: Jacob Newman , Ulrich Oldendorf , Martin Aenis , Andrew J. Constant , Shay Assaf , Jeffrey C. Hudgens , Alexander Berger , William Tyler Weaver
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G47/92 ; H01L21/67 ; H01L21/687
Abstract:
Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.
Information query
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