Invention Grant
- Patent Title: Capacitive micromachined ultrasonic transducer and manufacturing method thereof
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Application No.: US16425600Application Date: 2019-05-29
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Publication No.: US11235352B2Publication Date: 2022-02-01
- Inventor: Takahiro Akiyama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JPJP2018-105483 20180531
- Main IPC: B06B1/02
- IPC: B06B1/02
Abstract:
A high output and high reliability capacitive micromachined ultrasonic transducer (CMUT) is provided. The capacitive micromachined ultrasonic transducer has a concave portion on a surface of at least one insulating film. The surface faces an air gap.
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