Invention Grant
- Patent Title: Method for producing Ge-core based waveguides
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Application No.: US16213402Application Date: 2018-12-07
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Publication No.: US11236417B2Publication Date: 2022-02-01
- Inventor: Jean-Michel Hartmann , Mickael Brun , Jean-Marc Fedeli , Maryse Fournier
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1761862 20171208
- Main IPC: C23C16/24
- IPC: C23C16/24 ; C30B25/02 ; G02B6/10 ; C23C16/06 ; G02B6/13 ; C23C16/56 ; H01L21/02 ; G02B6/12

Abstract:
A method for producing a waveguide including a germanium-based core and a cladding is provided, the method including a step of “low temperature” depositing of a shell after forming the core by engraving, such that the deposition temperature is less than 780° C., followed by a step of “high temperature” depositing of a thick encapsulation layer. The shell and the encapsulation layer at least partially form the cladding of the waveguide. Optionally, a step of annealing under hydrogen at a “low temperature”, less than 750° C., precedes the deposition of the shell. These “low temperature” annealing and depositing steps advantageously make it possible to avoid a post-engraving alteration of the free surfaces of the core during the forming of the cladding which is less germanium-rich.
Public/Granted literature
- US20190177836A1 METHOD FOR PRODUCING GE-CORE BASED WAVEGUIDES Public/Granted day:2019-06-13
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