Invention Grant
- Patent Title: Silicon carbide substrate and method of growing SiC single crystal boules
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Application No.: US16492044Application Date: 2018-03-07
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Publication No.: US11236438B2Publication Date: 2022-02-01
- Inventor: Michael Vogel , Bernhard Ecker , Ralf Müller , Matthias Stockmeier , Arnd-Dietrich Weber
- Applicant: SICRYSTAL GMBH
- Applicant Address: DE Nuremberg
- Assignee: SICRYSTAL GMBH
- Current Assignee: SICRYSTAL GMBH
- Current Assignee Address: DE Nuremberg
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: EP17163519 20170329
- International Application: PCT/EP2018/055597 WO 20180307
- International Announcement: WO2018/177706 WO 20181004
- Main IPC: C30B23/00
- IPC: C30B23/00 ; C30B29/36

Abstract:
The present invention relates to a silicon carbide (SiC) substrate with improved mechanical and electrical characteristics. Furthermore, the invention relates to a method for producing a bulk SiC crystal in a physical vapor transport growth system. The silicon carbide substrate comprises an inner region (102) which constitutes at least 30% of a total surface area of said substrate (100), a ring shaped peripheral region (104) radially surrounding the inner region (102), wherein a mean concentration of a dopant in the inner region (102) differs by at maximum 5·1018 cm−3, preferably 1·1018 cm−3, from the mean concentration of this dopant in the peripheral region (104).
Public/Granted literature
- US20210148006A1 SILICON CARBIDE SUBSTRATE AND METHOD OF GROWING SiC SINGLE CRYSTAL BOULES Public/Granted day:2021-05-20
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