Flow rate regulating device and control method of flow rate regulating device
Abstract:
There is provided a flow rate regulating device including a valve body section having a flat valve body surface, a valve seat section having a flat valve seat surface, a regulation mechanism that moves the valve body section along an axis, and a control unit that controls the regulation mechanism, wherein the regulation mechanism has a stepping motor that rotates a drive shaft about the axis, and a moving member that moves along the axis in response to the rotation of the drive shaft and is coupled to the valve body section, and the control unit controls the stepping motor so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, in accordance with an excitation signal that changes by a micro step unit obtained by dividing a step by a predetermined division number.
Information query
Patent Agency Ranking
0/0