Invention Grant
- Patent Title: Apparatus and method for a scanning probe microscope
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Application No.: US16586239Application Date: 2019-09-27
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Publication No.: US11237185B2Publication Date: 2022-02-01
- Inventor: Ulrich Matejka , Christof Baur
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102017205528.6 20170331
- Main IPC: G01Q20/02
- IPC: G01Q20/02 ; G01Q10/06 ; G01Q40/02 ; G01Q10/04 ; G01Q70/08

Abstract:
The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.
Public/Granted literature
- US20200025796A1 APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE Public/Granted day:2020-01-23
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