Invention Grant
- Patent Title: Wide-field scanning probe microscope combined with an apparatus for modifying an object
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Application No.: US16302142Application Date: 2017-05-18
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Publication No.: US11237186B2Publication Date: 2022-02-01
- Inventor: Alexander Mihaylovich Alekseev , Aleksey Dmitrievich Volkov , Dmitry Yurjevich Sokolov , Anton Evgenievich Efimov
- Applicant: CHASTNOE UCHREZHDENIE “NAZARBAYEV UNIVERSITY RESEARCH AND INNOVATION SYSTEM”
- Applicant Address: KZ Astana
- Assignee: CHASTNOE UCHREZHDENIE “NAZARBAYEV UNIVERSITY RESEARCH AND INNOVATION SYSTEM”
- Current Assignee: CHASTNOE UCHREZHDENIE “NAZARBAYEV UNIVERSITY RESEARCH AND INNOVATION SYSTEM”
- Current Assignee Address: KZ Astana
- Agency: The Roy Gross Law Firm, LLC
- Agent Roy Gross
- Priority: KZ2016/0436.1 20160518
- International Application: PCT/KZ2017/000011 WO 20170518
- International Announcement: WO2017/200364 WO 20171123
- Main IPC: G01Q30/20
- IPC: G01Q30/20 ; G01Q10/04

Abstract:
The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.
Public/Granted literature
- US20190219610A1 WIDE-FIELD SCANNING PROBE MICROSCOPE COMBINED WITH AN APPARATUS FOR MODIFYING AN OBJECT Public/Granted day:2019-07-18
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