Invention Grant
- Patent Title: Method and apparatus for examining a measuring tip of a scanning probe microscope
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Application No.: US16736360Application Date: 2020-01-07
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Publication No.: US11237187B2Publication Date: 2022-02-01
- Inventor: Kinga Kornilov , Christof Baur , Markus Bauer
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102017211957.8 20170712
- Main IPC: G01Q70/06
- IPC: G01Q70/06 ; G01Q30/02 ; G01Q70/08 ; G01Q40/02 ; G01Q20/02
Abstract:
The present invention relates to a method for examining a measuring tip of a scanning probe microscope, wherein the method includes the following steps: (a) generating at least one test structure before a sample is analyzed, or after said sample has been analyzed, by the measuring tip; and (b) examining the measuring tip with the aid of the at least one generated test structure.
Information query
