Invention Grant
- Patent Title: Magnetic property measuring systems, methods of measuring magnetic property, and methods of fabricating magnetic memory devices using the same
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Application No.: US16592086Application Date: 2019-10-03
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Publication No.: US11237224B2Publication Date: 2022-02-01
- Inventor: Eunsun Noh
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H01L27/22
- IPC: H01L27/22 ; G01R33/032 ; H01L43/02 ; H01L43/12 ; H01L21/66 ; G01R15/24 ; G01R33/12
Abstract:
A magnetic property measuring system may include a stage configured to load a sample and to rotate the sample about a rotation axis such that the stage rotates the sample by a rotation angle, the rotation axis extending normal to a top surface of the sample. The magnetic property measuring system may further include a polarizer having a first polarization axis, and an analyzer having a second polarization axis. The polarizer and the analyzer may enable the first and second polarization axes to be independently rotated based on the rotation angle of the sample.
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