Invention Grant
- Patent Title: Pellicle and method for producing the same
-
Application No.: US16700077Application Date: 2019-12-02
-
Publication No.: US11237474B2Publication Date: 2022-02-01
- Inventor: Akinori Nishimura
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPJP2018-226482 20181203
- Main IPC: G03F1/62
- IPC: G03F1/62

Abstract:
The present invention is to provide a pellicle characterized by including a pellicle film and a pellicle frame, in which the pellicle film is stretched on the pellicle frame, and the pellicle film is an annealed pellicle film, and to provide a method for producing a pellicle by stretching a pellicle film on a pellicle frame, including the step of annealing the pellicle film alone before stretching the pellicle film on the pellicle frame, annealing the pellicle after stretching the pellicle film on the pellicle frame, or annealing the pellicle film alone and the pellicle both before and after stretching the pellicle film on the pellicle frame.
Public/Granted literature
- US20200174360A1 PELLICLE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2020-06-04
Information query