Invention Grant
- Patent Title: Pellicle frame and pellicle
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Application No.: US16735116Application Date: 2020-01-06
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Publication No.: US11237476B2Publication Date: 2022-02-01
- Inventor: Yu Yanase
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPJP2019-016992 20190201
- Main IPC: G03F1/64
- IPC: G03F1/64

Abstract:
The present invention is to provide a pellicle frame in a frame shape, having an upper end face to arrange a pellicle film thereon and a lower end face to face a photomask, and which is characterized by being provided with a notched part from an outer side face toward an inner side face of the upper end face, and to provide a pellicle characterized by including the pellicle frame as a component.
Public/Granted literature
- US20200249562A1 Pellicle Frame and Pellicle Public/Granted day:2020-08-06
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