Invention Grant
- Patent Title: Metal plate for manufacturing deposition mask and manufacturing method for metal plate, and deposition mask and manufacturing method for deposition mask
-
Application No.: US16578291Application Date: 2019-09-21
-
Publication No.: US11237481B2Publication Date: 2022-02-01
- Inventor: Hiroki Oka , Sachiyo Matsuura , Chiaki Hatsuta , Chikao Ikenaga , Hideyuki Okamoto , Masato Ushikusa
- Applicant: Dai Nippon Printing Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Burr & Brown, PLLC
- Priority: JPJP2017-219369 20171114,JPJP2017-249744 20171226,JPJP2018-002932 20180111
- Main IPC: C23C14/04
- IPC: C23C14/04 ; G03F7/00 ; G03F7/20 ; B21B1/22 ; C23C14/24 ; C25D1/04 ; C25D3/56 ; H01L51/56 ; H01L27/32 ; H01L51/00 ; H01L51/50
Abstract:
The metal plate includes a plurality of pits located on the surface of the metal plate. The manufacturing method for a metal plate for use in manufacturing of a deposition mask includes an inspection step of determining a quality of the metal plate based on a sum of volumes of a plurality of pits located at a portion of the surface of the metal plate.
Public/Granted literature
Information query
IPC分类:
