Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
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Application No.: US17195001Application Date: 2021-03-08
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Publication No.: US11237487B2Publication Date: 2022-02-01
- Inventor: Atsushi Kusaka
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JPJP2020-048025 20200318
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00

Abstract:
The present invention provides an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, the apparatus including a first detection unit configured to detect a surface structure in a wafer edge region of the substrate, a specifying unit configured to specify, from the surface structure detected by the first detection unit, an effective region in which the pattern of the imprint material is formed, and a first determining unit configured to determine, based on the effective region specified by the specifying unit, a shape of a peripheral shot region whose area is smaller than an area of a pattern region of the mold, and a second determining unit configured to determine based on the shape determined by the first determining unit, a supply position of the imprint material in the peripheral shot region.
Public/Granted literature
- US20210294224A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2021-09-23
Information query
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