Invention Grant
- Patent Title: Imaging device
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Application No.: US16756224Application Date: 2017-10-16
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Publication No.: US11239050B2Publication Date: 2022-02-01
- Inventor: Miku Maehara , Shigeru Kawamata , Yoshinobu Hoshino , Hiroyuki Chiba
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- International Application: PCT/JP2017/037369 WO 20171016
- International Announcement: WO2019/077650 WO 20190425
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
An object of the invention is to easily acquire an image of a position corresponding between each section in an imaging device that acquires an image of a plurality of sample sections. The imaging device according to the invention calculates, according to a correspondence relationship between a characteristic point and a first observation region in a first sample section, coordinates of a second observation region of a second sample section, and generates an observation image at the calculated coordinates (see FIG. 7B).
Public/Granted literature
- US20210193432A1 Imaging Device Public/Granted day:2021-06-24
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