Invention Grant
- Patent Title: Integrated circuit with optical tunnel
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Application No.: US16559807Application Date: 2019-09-04
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Publication No.: US11239152B2Publication Date: 2022-02-01
- Inventor: Otto Andreas Torreiter , Thomas Gentner , Martin Eckert
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Monchai Chuaychoo
- Main IPC: H01L25/16
- IPC: H01L25/16 ; H01L23/522 ; G01Q60/14 ; G01R31/265 ; G01R31/28

Abstract:
The invention relates to an integrated circuit with an active transistor area and a plurality of wiring layers arranged above the active transistor area. At least one optical device is integrated in the active transistor area. The optical device is electrically connected with at least one of the wiring layers. At least one optical tunnel extends from the at least one optical device through the plurality of wiring layers to a surface of an uppermost wiring layer of the plurality of wiring layers facing away from the active transistor area.
Public/Granted literature
- US20210066183A1 INTEGRATED CIRCUIT WITH OPTICAL TUNNEL Public/Granted day:2021-03-04
Information query
IPC分类: