- Patent Title: MIM capacitor of embedded structure and method for making the same
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Application No.: US17122265Application Date: 2020-12-15
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Publication No.: US11239153B2Publication Date: 2022-02-01
- Inventor: Yu Chen
- Applicant: Hua Hong Semiconductor (Wuxi) Limited
- Applicant Address: CN Wuxi
- Assignee: Hua Hong Semiconductor (Wuxi) Limited
- Current Assignee: Hua Hong Semiconductor (Wuxi) Limited
- Current Assignee Address: CN Wuxi
- Agency: MKG, LLC
- Priority: CN201911363247.9 20191226
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L49/02

Abstract:
The present application has disclosed an MIM capacitor of an embedded structure, wherein an interlayer film is formed between a first metal wire layer and a second metal wire layer; the MIM capacitor is formed on the surface of the interlayer film; a capacitor lower electrode is connected to the first metal wire layer by means of a bottom first via, the first metal wire layer is connected, by means of a second via outside the capacitor lower electrode, to a lower electrode lead-out structure formed by the second metal wire layer; and an upper electrode lead-out structure formed by the second metal wire layer covers the surface of the capacitor upper electrode of the MIM capacitor. The present application has further disclosed a method for manufacturing an MIM capacitor of an embedded structure. In the present application, the performance and stability of the capacitor can be improved.
Public/Granted literature
- US20210202376A1 MIM CAPACITOR OF EMBEDDED STRUCTURE AND METHOD FOR MAKING THE SAME Public/Granted day:2021-07-01
Information query
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