Invention Grant
- Patent Title: Method of forming an interconnect structure with enhanced corner connection
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Application No.: US16814305Application Date: 2020-03-10
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Publication No.: US11239165B2Publication Date: 2022-02-01
- Inventor: Ruilong Xie , Christopher J. Waskiewicz , Kangguo Cheng , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent L. Jeffrey Kelly
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/02 ; H01L23/535 ; H01L23/528

Abstract:
Interconnect structures and methods for forming the interconnect structures generally include forming a bulk metal encapsulated in first and second interlayer dielectrics, a liner layer about a lower surface of the bulk metal and a metal cap layer about an upper surface of the bulk metal. The liner layer is in the first interlayer dielectric and the metal cap layer is in the second interlayer dielectric, wherein liner layer and the metal cap layer are different metals.
Public/Granted literature
- US20210287988A1 INTERCONNECT STRUCTURE WITH ENHANCED CORNER CONNECTION Public/Granted day:2021-09-16
Information query
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