Invention Grant
- Patent Title: Cu—Cu bonding for interconnects on bridge chip attached to chips and packaging substrate
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Application No.: US16703252Application Date: 2019-12-04
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Publication No.: US11239167B2Publication Date: 2022-02-01
- Inventor: Mukta Ghate Farooq , Ravi K. Bonam , James J. Kelly , Spyridon Skordas
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Abdy Raissinia
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L25/065 ; H01L23/00 ; H01L25/00

Abstract:
Copper (Cu)-to-Cu bonding techniques for high bandwidth interconnects on a bridge chip attached to chips which are further attached to a packaging substrate are provided. In one aspect, a method of forming an interconnect structure is provided. The method includes: bonding individual chips to at least one bridge chip via Cu-to-Cu bonding to form a multi-chip structure; and bonding the multi-chip structure to a packaging substrate via solder bonding, after the Cu-to-Cu bonding has been performed, to form the interconnect structure including the individual chips bonded to the at least one bridge chip and to the packaging substrate. A structure formed by the method is also provided.
Public/Granted literature
- US20210175174A1 Cu-Cu Bonding for Interconnects on Bridge Chip Attached to Chips and Packaging Substrate Public/Granted day:2021-06-10
Information query
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