Invention Grant
- Patent Title: Single-photon avalanche diode detector array
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Application No.: US16911785Application Date: 2020-06-25
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Publication No.: US11239265B2Publication Date: 2022-02-01
- Inventor: Edward Van Sieleghem
- Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R & D
- Applicant Address: BE Leuven; BE Leuven
- Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R & D
- Current Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R & D
- Current Assignee Address: BE Leuven; BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP19183610 20190701
- Main IPC: H01L27/144
- IPC: H01L27/144 ; H01L31/107

Abstract:
Example embodiments relate to single-photon avalanche diode detector (SPAD) arrays. One embodiment includes a SPAD array that includes a silicon substrate, a plurality of primary electrodes, and a plurality of secondary electrodes. Each of the primary electrodes includes a semiconductor material of a first doping type, extends in the silicon substrate in a first direction, and has a rotationally symmetric cross-section in a first plane perpendicular to the first direction. The plurality of secondary electrodes includes a semiconductor material of a second doping type and extends parallel to the primary electrodes in the silicon substrate. Further, the silicon substrate includes a doped upper field redistribution layer, a doped lower field redistribution layer, and a doped depletion layer arranged between the upper field redistribution layer and the lower field redistribution layer. A cross-section of each primary electrode is surrounding by one or more cross-sections of at least one neighboring secondary electrode.
Public/Granted literature
- US20210005645A1 Single-Photon Avalanche Diode Detector Array Public/Granted day:2021-01-07
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